About: http://webisa.webdatacommons.org/30967291

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Moreover, a piezoelectric substrate including a piezoelectric thin film made of ZnO or other suitable material formed on an insulation substrate made of alumina or other suitable material may be used.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com