| http://www.w3.org/ns/prov#value | - With modulating elements with steerable deflection it is possible to create a constant geometrical realtion between the deflection at a pixel at an edge and the edge, i.e. directing it in a direction perpendicular to the edge and toward the interior of the feature. [0038] With a diffraction type SLM it is possible to create symmetry by overlaying exposures with opposite phase maps.
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