About: http://webisa.webdatacommons.org/328649759

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	ource of atomic hydrogen, a source of RF power to form a plasma, a catalyst capable of providing a net enthalpy of reaction of m/2???27.2???0.5 eV where m is an integer, preferably m is an integer less than 400, and a source of silicon.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com