| http://www.w3.org/ns/prov#value | - 97383 Jun 20044 Nov 2004Dinesh ChopraMethod of providing a structure using self-aligned featuresUS2005002369731 Ago 20043 Feb 2005Micron Technology, Inc.Methods for making integrated-circuit wiring from copper, silver, gold, and other metals* Citada por examinador Citada por Patente citante Fecha de presentaci???n Fecha de publicaci???n Solicitante T???tuloUS7879715 *8 Oct 20071 Feb 2011Unitive In
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