| http://www.w3.org/ns/prov#value | - Furthermore, as shown in FIG. 1, a conventional pressure sensor or a sensing portion of a microphone wherein the displacement of the diaphragm is detected by utilizing Fabry-Perot interference, is provided with a diaphragm 5 of a mica sheet or the like having a thickness of 10 ??m or more, a fiber 6 on the end surface of which Al is deposited, a spacer 8 of a material such as invar or crystal havi
|
