About: http://webisa.webdatacommons.org/333858421

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Yet another advantage of the present invention is a method of manufacturing ???in-laid???, ???damascene???-type Cu-based metallization patterns having improved reliability, high conductivity, and improved electromigration resistance.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com