About: http://webisa.webdatacommons.org/343316934

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In one aspect, the invention is a system for probing a volume of material (e.g., electronic material or electronic device) by detecting local electrical conductivity in regions of the material using microwave induced localized heating.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com