About: http://webisa.webdatacommons.org/343407932

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Another object of the present invention is a method of producing a semiconductor device having an interconnection structure with high operating speeds and improved signal-to-noise ratio, linearity, wear characteristics and reliability.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com