| http://www.w3.org/ns/prov#value | - e apparatus may occur when there is a change in the atmospheric pressure or in the amount of dissolved gases in the immersion liquid supplied from the factoryequipment, which may cause an occurrence of micro-bubbles and deterioration of the optical performance.SUMMARY OF THE INVENTIONThe present invention has been made in consideration of the above-described problem, and attains a liquid immersion
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