About: http://webisa.webdatacommons.org/367545512

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The present invention is a method of fabricating a patterned device using a sacrificial spacer layer.
http://www.w3.org/ns/prov#wasQuotedFrom	orangemane.com