About: http://webisa.webdatacommons.org/371674444

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 36A is a plan view of a transport mechanism for heat treatment, anti-reflective coating formation, resist film formation, edge exposure or development in a modified embodiment;
http://www.w3.org/ns/prov#wasQuotedFrom	google.com