| http://www.w3.org/ns/prov#value | - 16 May 2006Rj Mears, LlcMethod for making a semiconductor device including a superlattice and adjacent semiconductor layer with doped regions defining a semiconductor junctionUS70458131 Apr 200516 May 2006Rj Mears, LlcSemiconductor device including a superlattice with regions defining a semiconductor junctionUS7064037 *12 Jan 200420 Jun 2006Chartered Semiconductor Manufacturing Ltd.Silicon-germani
|
