| http://www.w3.org/ns/prov#value | - as a ???processing optical system???) for performing various types of processing upon the reflected light. [0092] On the intermediate image forming side (or the image side in the magnifying optical system), the optical system is desired to have telecentricity (image-side telecentricity) so as to relay the light to the projection optical system 52 without losses of the amount of light and to elimi
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