About: http://webisa.webdatacommons.org/391589078

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	As shown in FIG. 3, a sputtering system 40 of the invention is a system for forming the low-resistance metal layers 28, 29, piezoelectric layer 24, and upper electric layer 26 shown in FIGS. 1 and 2.
http://www.w3.org/ns/prov#wasQuotedFrom	freshpatents.com