About: http://webisa.webdatacommons.org/39205004

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Such systems are utilized in a variety of applications, including ion beam lithography and direct ion implantation in such fields as semiconductor processing, ion mass spectrometry, and sub-micron machining.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com