| http://www.w3.org/ns/prov#value | - A microelectromechanical structure, comprising:a substrate having a top surface; a trench formed in said substrate and including side walls and a floor; released microelectromechanical beam means and a fixed mesa supporting said beam means located within and completely surrounded by said trench and being fabricated from said substrate, said beam means comprising a spiral microinductor having first
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