About: http://webisa.webdatacommons.org/401152403

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The present invention is a system and method for collecting operational, event, alarm, and related data from a tool's central processing unit (CPU) and/or module CPUs used for controlling the tools.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com