About: http://webisa.webdatacommons.org/404312375

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 7A is a side view for explaining the pitch changing mechanism of the cassette transfer and wafer transfer device, and FIG. 7B is a rear view taken along the line Y--Y in FIG. 7A.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com