About: http://webisa.webdatacommons.org/411938131

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The insulation film 15 is preferably made of silicon oxide, SOG (Spin On Glass), various silicate glass (BSG, PSG, or BPSG), silicon nitride or various kinds of organic insulating film.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com