About: http://webisa.webdatacommons.org/421846341

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	One tool that may be adapted to benefit from the invention is an electrochemical processing platform or system, such as an Electra??? processing system available from Applied Materials, Inc. located in Santa Clara, Calif.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com