About: http://webisa.webdatacommons.org/422036611

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In an embodiment, the present invention is a method that includes performing a bake-out cycle, in between deposition cycles, in order to reduce the amount of unreactive monomer that is deposited during a deposition cycle.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com