About: http://webisa.webdatacommons.org/423461815

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The method of claim 1, wherein the semiconductor layer is a portion of a multi-layer stack, and the method creates substantially no cracks in the layers in the multi-layer stack.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au