| http://www.w3.org/ns/prov#value | - The multi-layer control dielectric may include a combination of high-k dielectric materials such as aluminum oxide (Al2O3), hafnium oxide (HfO2), and/or hybrid films of hafnium aluminum oxide (HfAlOx, wherein x is a positive integer, e.g., 1, 2, 3, 4, etc.) therein.
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