About: http://webisa.webdatacommons.org/43944583

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Next, as indicated in FIG. 11A and FIG. 11B, after the insulating film such as BPSG has been formed on the entire surface, the resultant film is planar-processed by the reflow process to thereby form the interlayer insulating film 117.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com