About: http://webisa.webdatacommons.org/445146141

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	For example, if SiN is to be formed, process gases such as NH3 and SiH4 may be used.
http://www.w3.org/ns/prov#wasQuotedFrom	freshpatents.com