About: http://webisa.webdatacommons.org/52351769

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The pellicle thus invented, and disclosed herein is a dust-preventing film made from a high polymer organic silicon compound and can be used in applications of lithography wherein the emitted light has a wave length of 500 nm or shorter.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com