About: http://webisa.webdatacommons.org/55509155

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The test pad of claim 1 wherein the plug is a conductive material selected from the group consisting of aluminum, tungsten, metal silicide, and polysilicon.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com