About: http://webisa.webdatacommons.org/60536055

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The specific problems solved and advantages realized by the invention are particularly applicable to vacuum processes, however, especially to sputter processing operations.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com