| http://www.w3.org/ns/prov#value | - However, when the substrate holder is made of an insulating material, such as quartz, and drying is carried out in the state where water drops adhere to the substrate holder, since the induction heating efficiency of the substrate holder is very low, there is caused a disadvantage in which the drying of the substrate holder takes longer than the drying of the semiconductor substrate.
|
