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http://webisa.webdatacommons.org/81129655
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http://www.w3.org/1999/02/22-rdf-syntax-ns#type
http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value
Continuing with the illustrated example, the silicon substrate layer 103 may then be thinned using standard lapping technologies down to a thickness of for example about 80 ??m or less.
http://www.w3.org/ns/prov#wasQuotedFrom
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