About: http://webisa.webdatacommons.org/9598526

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	m or the gate electrode; and numeral 141 is a thick insulating film for electrically insulating the impurity diffused layers and the gate electrodes from theoverlying metal wirings.
http://www.w3.org/ns/prov#wasQuotedFrom	patentgenius.com