This HTML5 document contains 5 embedded RDF statements represented using HTML+Microdata notation.

The embedded RDF content will be recognized by any processor of HTML5 Microdata.

PrefixNamespace IRI
n4google.
isaphttp://webisa.webdatacommons.org/prov/
isahttp://webisa.webdatacommons.org/
rdfhttp://www.w3.org/1999/02/22-rdf-syntax-ns#
provhttp://www.w3.org/ns/prov#
xsdhhttp://www.w3.org/2001/XMLSchema#
Subject Item
isa:160580623
rdf:type
prov:Entity
prov:value
tentFiling datePublication dateApplicantTitleUS7786320May 12, 2009Aug 31, 2010Advanced Technology Materials, Inc.Composition and method for low temperature deposition of silicon-containing films such as films including silicon, silicon nitride, silicon dioxide and/or silicon-oxynitrideUS7887883May 11, 2010Feb 15, 2011Advanced Technology Materials, Inc.Composition and method for low temperature dep
prov:wasQuotedFrom
n4:com
Subject Item
isap:70482790
prov:wasDerivedFrom
isa:160580623
Subject Item
isap:73720172
prov:wasDerivedFrom
isa:160580623