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PrefixNamespace IRI
n5google.
isaphttp://webisa.webdatacommons.org/prov/
isahttp://webisa.webdatacommons.org/
rdfhttp://www.w3.org/1999/02/22-rdf-syntax-ns#
provhttp://www.w3.org/ns/prov#
xsdhhttp://www.w3.org/2001/XMLSchema#
Subject Item
isa:179450096
rdf:type
prov:Entity
prov:value
Further, a doped silicon layer or a metal such as aluminum or tungsten is formed at 2000-6000 ???, e.g., 3000 ??? on the insulating layer 53 and patterned to form a gate electrode 56 on each island.
prov:wasQuotedFrom
n5:de
Subject Item
isap:341424648
prov:wasDerivedFrom
isa:179450096
Subject Item
isap:363606097
prov:wasDerivedFrom
isa:179450096
Subject Item
isap:346133295
prov:wasDerivedFrom
isa:179450096
Subject Item
isap:358765996
prov:wasDerivedFrom
isa:179450096