This HTML5 document contains 4 embedded RDF statements represented using HTML+Microdata notation.

The embedded RDF content will be recognized by any processor of HTML5 Microdata.

PrefixNamespace IRI
n5google.
isaphttp://webisa.webdatacommons.org/prov/
isahttp://webisa.webdatacommons.org/
rdfhttp://www.w3.org/1999/02/22-rdf-syntax-ns#
provhttp://www.w3.org/ns/prov#
xsdhhttp://www.w3.org/2001/XMLSchema#
Subject Item
isa:305694568
rdf:type
prov:Entity
prov:value
The ions may comprise for example phosphorus ions or silicon ions and a dose between 1013 and 1016 ions cm-2 is sufficient for the radiation hardening of PMMA. An electron flood may be used to prevent charging of the resist during the ion implantation, alternatively a thin conducting layer (for example 100 ??? of aluminium) may be evaporated onto the resist and earthed during the implantation to p
prov:wasQuotedFrom
n5:es
Subject Item
isap:281847789
prov:wasDerivedFrom
isa:305694568