| http://www.w3.org/ns/prov#value | - The ions may comprise for example phosphorus ions or silicon ions and a dose between 1013 and 1016 ions cm-2 is sufficient for the radiation hardening of PMMA. An electron flood may be used to prevent charging of the resist during the ion implantation, alternatively a thin conducting layer (for example 100 ??? of aluminium) may be evaporated onto the resist and earthed during the implantation to p
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