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An Entity of Type : prov:Entity, within Data Space : webisa.webdatacommons.org associated with source dataset(s)

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prov:value
  • A susceptor, comprising:a susceptor wafer support plate composed of aluminum nitride having an electrically conductive element embedded therein, said plate including a back side from which wiring connected to said electrically conductive element embedded therein emerges; a support stand configured to form a tube, said tube having a first end configured to form a joint with said back side of said s
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