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An Entity of Type : prov:Entity, within Data Space : webisa.webdatacommons.org associated with source dataset(s)

AttributesValues
rdf:type
prov:value
  • a light emitting means for emitting light toward said substrate on said rotary stage by directing the light toward the edge of said substrate including the edge of said transparent layer and the edge of said nontransparent layer; and
prov:wasQuotedFrom
is prov:wasDerivedFrom of
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