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An Entity of Type : prov:Entity, within Data Space : webisa.webdatacommons.org associated with source dataset(s)

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  • For example, the exposing device 410 may be or comprise one or more stepper, step-and-scan, and/or other lithography components, modules, or systems.The optical property measurer 420 may be any device, system, component, or other apparatus configured to measure optical properties of at least a portion of the mask before and/or after the mask is utilized by the exposing device 410 during one or mor
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