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An Entity of Type : prov:Entity, within Data Space : webisa.webdatacommons.org associated with source dataset(s)

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  • To achieve the object, there is provided a plasma processing apparatus having a processing chamber in which a wear environment is formed, the apparatus including a component disposed in the processing chamber; and a bolt for attaching the component to a base portion formed of a brittle member, wherein the bolt includes a head formed of a wear resistant material, a body which is formed of a resin h
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