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An Entity of Type : prov:Entity, within Data Space : webisa.webdatacommons.org associated with source dataset(s)

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  • A material forming the first grating 6 located nearest to the substrate is composed of TiO2, grating period ??1 is set to 0.15 ??m, grating depth d1 is set to 1.85 ??m, and filling factor FF1 (=w1/??1) is set to 0.90.
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