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owl:sameAs
Inference Rule:
b3s
b3sifp
facets
http://www.w3.org/2002/07/owl#
ldp
oplweb
skos-trans
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isa:129390977
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An Entity of Type :
prov:Entity
, within Data Space :
webisa.webdatacommons.org
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Type:
prov:Entity
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prov:Entity
prov:value
t of the substrate support 104.The one or more sensors 116 may be ultrasonic, laser, inductive, capacitive, or other type of sensor capable of detecting the proximity of the substrate support 104 within the chamber body 102.
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patentgenius.com
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prov:wasDerivedFrom
of
isap:202416672
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