Description
Metadata
Settings
owl:sameAs
Inference Rule:
b3s
b3sifp
facets
http://www.w3.org/2002/07/owl#
ldp
oplweb
skos-trans
virtrdf-label
None
About:
isa:150027946
Sponge
Permalink
An Entity of Type :
prov:Entity
, within Data Space :
webisa.webdatacommons.org
associated with source
dataset(s)
Type:
prov:Entity
New Facets Session with This Class
Attributes
Values
rdf:type
prov:Entity
prov:value
Also, as impurities such as the black film formed by the anode do not go into the plating solution supplied to the wafer, management of the plating solution will become easier.
prov:wasQuotedFrom
google.com
is
prov:wasDerivedFrom
of
isap:177124355
isap:460620218
Alternative Linked Data Views:
ODE
Raw Data in:
CXML
|
CSV
| RDF (
N-Triples
N3/Turtle
JSON
XML
) | OData (
Atom
JSON
) | Microdata (
JSON
HTML
) |
JSON-LD
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