| prov:value
| - The insulating film may be made of an inorganic material such as silicon oxide, silicon nitride, aluminum oxide, titanium oxide, calcium fluoride, or the like, or a polymeric material such as acrylic resin, epoxy resin, polyimide, tetrafluoroethylene, or the like, or a self-organizing molecular film such as of aminopropylethoxysilane.
|