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An Entity of Type : prov:Entity, within Data Space : webisa.webdatacommons.org associated with source dataset(s)

AttributesValues
rdf:type
prov:value
  • The process starts at step 201 with a blank quartz photomask, coated with masking film, such as chrome, MoSi, carbon, etc.
prov:wasQuotedFrom
is prov:wasDerivedFrom of
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