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An Entity of Type : prov:Entity, within Data Space : webisa.webdatacommons.org associated with source dataset(s)

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rdf:type
prov:value
  • at least one holding device including a support having a first end for supporting the chip, a vacuum chamber arranged in the support, the first end comprising an opening that communicates with the vacuum chamber, an annular seal arranged around the opening at the first end, and a vacuum source which evacuates the vacuum chamber, the support being mounted on a movable stand;
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