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An Entity of Type : prov:Entity, within Data Space : webisa.webdatacommons.org associated with source dataset(s)

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  • ronment, the passivation layer including a compound having a formula selected from the group consisting of M(O)yXz, M(O)yXzWn, MxXy, and combinations thereof, wherein O stands for oxygen, M is any species present in the dielectric insulating film other than oxygen or nitrogen, and wherein X, and W are selected from the group consisting of nitrogen, fluorine, carbon, chlorine, iodine, and CO3, and
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