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An Entity of Type : prov:Entity, within Data Space : webisa.webdatacommons.org associated with source dataset(s)

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  • Furthermore, even in the case where one kind or a plurality of kinds of elements selected from the group consisting of H, H2, O, O2, P, and H2O, in addition to a rare gas element, one kind or a plurality of kinds of elements selected from the group consisting of H, H2, O, O2, P, and H2O is added to the base insulating film as well as the substrate.
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