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An Entity of Type : prov:Entity, within Data Space : webisa.webdatacommons.org associated with source dataset(s)

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  • Heater or electrode material, such as TiN, TaN, W, Al, Cu, TiSiN, TaSiN, or other suitable heater or electrode material, is deposited in via 194 between thermal insulation material layers 190a-190d to provide first electrode or heater
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