About: isa:350714788   Sponge Permalink

An Entity of Type : prov:Entity, within Data Space : webisa.webdatacommons.org associated with source dataset(s)

AttributesValues
rdf:type
prov:value
  • Referring to FIGS. 16A and 16B, starting from the structure presented in FIGS. 15A and 15B, in a next step for the definition of the active regions 12, isolation trenches 2 are formed which are filled up with an insulating material, especially silicon dioxide, as has been described with reference to FIGS. 3A and 3B. FIG. 16A shows a top view on the resulting trench capacitor 3 with the isolation t
prov:wasQuotedFrom
is prov:wasDerivedFrom of
Alternative Linked Data Views: ODE     Raw Data in: CXML | CSV | RDF ( N-Triples N3/Turtle JSON XML ) | OData ( Atom JSON ) | Microdata ( JSON HTML) | JSON-LD    About   
This material is Open Knowledge   W3C Semantic Web Technology [RDF Data] Valid XHTML + RDFa
OpenLink Virtuoso version 07.20.3217, on Linux (x86_64-pc-linux-gnu), Standard Edition
Data on this page belongs to its respective rights holders.
Virtuoso Faceted Browser Copyright © 2009-2012 OpenLink Software