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An Entity of Type : prov:Entity, within Data Space : webisa.webdatacommons.org associated with source dataset(s)

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  • The surface including the trenches can have a rectangular, trapezoidal, oval, or convex hull profile. ?? can be in a range from about 150 nm to about 5,000 nm (e.g., from about 400 nm to about 700 nm, from about 1,200 nm to about 1,700 nm).
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